Patterning of an amine-terminated nanolayer by extreme ultraviolet
نویسندگان
چکیده
منابع مشابه
Design of Dye Adsorption by Amine Terminated Dendritic Functionalized Halloysite Nanotubes Using Response Surface Methodology (RSM)
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An Extreme Ultraviolet Spectrometer
A concept and preliminary design of an Extreme Ultraviolet (EUV) spectrometer is presented. The spectrometer is based on a gas ionization chamber and an advanced eight-electrode electron focusing system to form a narrow electron beam on a photodiode aperture. The design is modeled with the SIMulation of IONs (SIMION) tools and shows the ability to scan through the spectral range of 20.0 – 40.6 ...
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Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact table-top set up.
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2007
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2803216